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Tungsten hexafluoride CAS: 7783-82-6 WF6
High Purity 99.999% 5N Semiconductor Material
Product introduction
Tungsten hexafluoride is a kind of colorless gas at room temperature, it is strong pungent, toxic and similar to toxicity of fluorine, its molecular formula is WF6 and molecular weight is 297.830, boiling point is 17.5 ℃ and melting point is 2.3 ℃. Tungsten hexafluoride can be dissolved in organic solvents and decompose in water, it also decomposes by moisture in the air and then smokes strongly. Its chemical property is active, and it can react with almost all of metals (except gold and platinum) and corrode nickel, monel alloys and stainless steel. Tungsten hexafluoride is the only one produced steadily and industrially among the fluoride of tungsten, and it is used as the raw material of chemical vapor deposition (CVD) process of tungsten in the electronic industry, which is its main application field. In particular, WSi2 made from WF6 can be used as wiring material in large scale integrated circuit (LSI).
Quality Specification
|
Items |
Units |
Index |
Index |
Index |
|
Tungsten hexafluoride≥ |
Vol.% |
99.9 |
99.999 |
99.9995 |
|
Carbon tetrafluoride（CF4）≤ |
Vol.ppm |
10 |
0.5 |
0.5 |
|
Nitrogen（N2）≤ |
Vol.ppm |
50 |
1 |
0.5 |
|
Oxygen+ Argon（O2+Ar）≤ |
Vol.ppm |
50 |
0.5 |
0.5 |
|
Carbon dioxide（CO2）≤ |
Vol.ppm |
- |
0.5 |
0.5 |
|
Carbon monoxide（CO）≤ |
Vol.ppm |
- |
0.5 |
0.5 |
|
Sulfur hexafluoride（SF6）≤ |
Vol.ppm |
10 |
0.5 |
0.5 |
|
Silicon tetrafluoride（SiF4）≤ |
Vol.ppm |
10 |
0.5 |
0.5 |
|
Hydrogen fluoride（HF）≤ |
Vol.ppm |
800 |
1 |
1 |
Application
Tungsten hexafluoride can be used as the raw material of chemical vapor deposition (CVD) process of tungsten in the electronic industry, also can be used as semiconductor electrode and conductive paste. In addition, tungsten hexafluoride is widely used as fluridizer, polymerization catalyst and raw material of optical materials.
Packaging、Storage
Tungsten hexafluoride is stored in standard seamless cylinders, the packing specifications include 8L, 44L and 47L respectively. Specific packaging specifications can be customized according to user requirements. Tungsten hexafluoride is stored in a shady, dry and ventilated storeroom away from fire and heat source. The storage area shall be equipped with equipment for emergency.
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