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Electroless NiP alloy is an essential engineered material used in optical system, particularly in the field of extreme ultraviolet (EUV) technology, where high reflective of short-wavelength light is required. However, it is still challenging to achieve highly efficient sub-nanometer polishing of NiP aspheric mirror. MG-Optics manufacture it with SPDT machine and MRF to get surface quality is better 1/100 lamda and surface roughness up to 3nm.
The process of Single-Point Diamond Turning (SPDT) is widely used to achieve high-precision surface quality and economical manufacturing of metallic mirrors. However, surfaces machined by SPDT exhibit periodic structures, leading to a surface roughness of approximately 5 nm . For optimal performance in the EUV spectral range, it is essential to eliminate the typical diamond turning structure through polishing to completely decrease scatter losses. Magnetorheological finishing (MRF) is employed to enhance surface roughness to Ra＜1nm.
Single-Point Diamond Turning SPDT 650FG V2
SPECIFICATIONS
|
Material Options |
RSA-6061, Ni-P Alloys, Cu etc. |
|
Size |
50mm-600mm |
|
RMS |
1/100 RMS or better |
|
Ra |
Up to 1nm |
|
Coating |
Al, Ag, Au & High Laser Damage Threshold Dielectic as needed |
|
Design Services |
Optical, FEA, Dynamic & Thermal Analysis |
MG-Optics will also provide you custom CGH for aspheric mirror optical metrology.
If you are interested with our products, Just send us your drawings or specifications, we will begin preparing a quotation for you.
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Main Product:
optical aspheric mirror,
custom CGH,
optical flat,
optical Mirror blank ,
optical metrology,
optical system
